Home   |   Products   |   Analysis   |   Harmony ASR Software
Harmony ASR Software

Rudolph Technologies offers the first complete off-line all-surface review, Harmony ASR™ Software. Harmony ASR is a fast classification solution that rapidly guides users through the sequences of defect classification and correlation.

Overview

  • Maximize tool inspection throughput while Harmony ASR performs off line
  • Expect a high rate of accuracy and consistency with Harmony ASR
  • Operators correlate and visualize defects individually or collectively using an interactive, all-surface wafer map
  • View correlated defects based on location - wafer edge, frontside, and backside
  • Select individual or multiple images in the Gallery Mode for fast classification and defect comparison
  • Export a wafer map in any format supported by our "plug-n-play" wafer maps
  • Enhance the value of your all-surface inspection equipment by increasing total inspection and classification throughput
Classification
Yield Analysis

TrueADC Software

Improve the Process and Make More Informed Decisions per Hour
Learn More