The Explorer™ Inspection Cluster delivers fast, accurate and reliable macro inspection with flexible configuration of multi-surface inspection capabilities. The Explorer Architecture allows individual systems to be configured with any combination of wafer front, back, and edge module allowing the user to mix and match throughput and inspection type to best fit specific requirements and reduce cost-of-ownership.

The Explorer Architecture is a modular approach to wafer inspection consisting of one or more inspection modules with brightfield and darkfield illumination, a substrate handler, and software that coordinates the activities.

View the Explorer Inspection Cluster in detail

Frontside Inspection Module

Edge Inspection Module

Backside Inspection Module

For more information about the Explorer Inspection Cluster, please contact us.