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S3000 CD System

The S3000 CD™ combines the excellent thin-film measurement accuracy, repeatability, and tool-to-tool matching of Rudolph's fab-wide Focused Beam™ technology tool, the S3000™, with new optical critical dimension (CD) measurements. Optical CD is a key process control technology for semiconductor manufacturers at the 90 nm technology node and below, where very small changes in transistor dimensions can result in significant reductions in device performance. Optical CD applications can be found in the litho, etch, and CMP modules.

Overview

  • Production-worthy measurements of gate length, width, sidewall angle, and other CD parameters are made with Focused Beam Scatterometry (FBS), which uses patented simultaneous multi-angle multi-wavelength laser technology
  • Low cost of ownership is achieved by eliminating the need for separate CD and film thickness tools as the multi-angle measurement capability offers excellent sensitivity to both thickness and CD
  • Meets current and future process requirements as the small laser spot size can measure in shrinking test structures—as small as 50 x 50 micron—within the scribe line or active die region
  • Patterned Film Metrology: Designed for cost-effective on-product metrology, the S3000 CD can measure film thickness on patterned structures that manufacturers are adopting to more closely represent how a process will perform on active die
  • High throughput is maintained with high intensity laser light sources and the tool-based CD SmartSearch™ data analysis
  • Gauge-capable thickness measurements of films ranging from 10 Å to greater than 20,000 Å are achievable with the multi-angle capability, which simultaneously performs ellipsometry from a 40º to a 70º angle of incidence to eliminate order ambiguity
  • Unparalleled system-to-system matching, superior repeatability, and significantly lower maintenance are attained by using up to three laser light sources that cover the spectrum with inherently stable wavelengths and long lifetimes
  • Fast image processing and greater immunity to noise, low contrast, and color variation than other commonly used systems are made possible with Cognex PatMAX™ geometric pattern recognition
  • Meets industry standards for 300mm automation