The S3000S™ Metrology System is designed for in-line process control of advanced diffusion and fabwide thin film applications. Its innovative optical design enables simultaneous measurement with multi-wavelength, multi-angle Focus Beam Ellipsometry (FBE) and deep ultraviolet reflectometry (DUVR), reducing measurement time and significantly increasing throughput over previous generations.
For more information on the S3000S System, please contact us.