Flanders, New Jersey, October 7, 2003 - Rudolph Technologies, Inc. (Nasdaq: RTEC), a
worldwide leader in the design, development, manufacture and support of high-performance
process control metrology systems used by semiconductor device companies, will release
results for the third quarter ended September 30, 2003, after the market closes on Monday,
October 27, 2003. In conjunction with this release, Rudolph will host a conference call,
which will be broadcast live over the Internet. Paul F. McLaughlin, Chairman and Chief
Executive Officer, and Steven Roth, Chief Financial Officer, will host the call.

Monday, October 27, 2003
4:45 p.m. (Eastern Time)

To access the live webcast, please visit the Company's Web site at www.rudolphtech.com.
Please go to the Web site at least fifteen minutes prior to the call to register, download and
install any necessary audio software.

About Rudolph Technologies:
Rudolph Technologies is a worldwide leader in the design, development, manufacture and
support of high-performance process control metrology systems used by semiconductor
device manufacturers. The Company provides a full-fab solution through its families of
proprietary systems for metrology applications used throughout the device manufacturing
process. Rudolph's product development has successfully anticipated and addressed many
emerging trends that are driving the semiconductor industry's growth. The Company's success
in creating complementary metrology applications through aggressive research and
development is key to Rudolph's strategy for continued technological and market leadership.