Flanders, New Jersey, January 8, 2004 - Rudolph Technologies, Inc. (Nasdaq: RTEC), a worldwide leader in the design, development, manufacture and support of high-performance process control metrology systems used by semiconductor device companies, will release results for the fourth quarter and year ended December 31, 2003, after the market closes on Monday, February 2, 2004. In conjunction with this release, Rudolph will host a conference call, which will be broadcast live over the Internet. Paul F. McLaughlin, Chairman and Chief Executive Officer, and Steven Roth, Chief Financial Officer, will host the call.

Monday, February 2, 2004
4:45 p.m. (Eastern Time)

To access the live webcast, please visit the Company's Web site at www.rudolphtech.com.

Please go to the Web site at least fifteen minutes prior to the call to register, download and install any necessary audio software.

About Rudolph Technologies:
Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology systems used by semiconductor device manufacturers. The Company provides a full-fab solution through its families of proprietary systems for metrology applications used throughout the device manufacturing process. Rudolph's product development has successfully anticipated and addressed many emerging trends that are driving the semiconductor industry's growth. The Company's success in creating complementary metrology applications through aggressive research and development is key to Rudolph's strategy for continued technological and market leadership.