Previous Record Tool Order was Announced in 2003 Third Quarter and Shipments Began in the 2003 Fourth Quarter
Flanders, N.J., February 26, 2004- Rudolph Technologies, Inc. (Nasdaq: RTEC), a leading provider of thin film metrology and macro-defect inspection tools for semiconductor manufacturing, has started to ship tools from its largest single order ever. The multi-million dollar (USD) order was received recently from a major Taiwanese foundry and includes multiple MetaPULSE-II™ systems, Rudolph's most advanced second-generation opaque film measurement tool, and multiple ultra-II™ laser spectroscopic ellipsometer systems, the latest generation tool for transparent film metrology. All tools will be used for monitoring high-volume manufacturing of 300 mm wafers at the 130 nm node and are qualified for 90 nm low-κ processes. . The receipt of this order follows another multi-million dollar seven tool order, which Rudolph previously announced in September and at the time was a record-sized order for the Company.
This is a repeat order for Rudolph's 300 mm tools, as the foundry continues to ramp up production. The tools were chosen for their advanced capabilities for measuring ultrathin gates and copper interconnect processes. The tools have begun shipping, and the full order is expected to be completed in the first half of 2004
"Rudolph continued to invest in developing state-of-the-art technology despite the economic downturn. This investment has enabled us to introduce new metrology tools that meet or exceed the industry's most advanced requirements for thin film metrology and 300 mm automation," said Nathan Little, Rudolph's senior vice president of operations.
"Sales of the MetaPULSE-II are strong, particularly among manufacturers with 130 and 90 nm copper processes who are introducing low-κ materials into their manufacturing. The ultra-II continues in Rudolph's strong tradition of providing the industry's best transparent film metrology, offering superior performance on sub-20 Å oxide and nitrided gates as well as advanced capabilities for measuring both low-κ and high-κ materials, SiGe, and 193 nm ARCs," stated Little.
For more information about Rudolph and their products visit the Rudolph Technology web site at http://rudolphtech.com.
About Rudolph Technologies, Inc.
Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology and defect inspection and classification systems used by semiconductor device manufacturers. The Company's products provide a full-fab solution through its families of proprietary systems which are used throughout the device manufacturing process. Rudolph's product development has successfully anticipated and addressed many emerging trends that are driving the semiconductor industry's growth in order to enhance the competitiveness of its products in the marketplace. The Company's success in creating complementary metrology and inspection applications through aggressive research and development is key to Rudolph's strategy for continued technological and market leadership.
Safe Harbor Statement
This press release contains forward-looking statements. Actual results may differ materially from those projected due to a number of risks, including, but not limited to, the impact of the slowdown in the overall economy, the uncertainty of the current global political environment, the potential for terrorist attacks, the potential for business disruptions due to infectious diseases, changes in customer demands for our existing and new products, the timing, cancellation or delay of customer orders and shipments, the timing of revenue recognition of shipments, new product offerings from our competitors, changes in or an inability to execute Rudolph Technologies' business strategy, unanticipated manufacturing or supply problems and changes in tax rules. Rudolph Technologies cannot guarantee future results, levels of activity, performance, or achievements. The matters discussed in this press release also involve risks and uncertainties summarized under the heading "Risk Factors" in Rudolph Technologies' Form 10K filed for the year ended December 31, 2003. These factors are updated from time to time through the filing of reports and registration statements with the Securities and Exchange Commission. Rudolph Technologies does not assume any obligation to update the forward-looking information contained in this press release