FLANDERS, N.J.-- October 5, 2004--Rudolph Technologies, Inc. (NASDAQ:RTEC), a worldwide leader in the design, development, manufacture and support of high-performance process control metrology systems used by semiconductor device companies, will release results for the third quarter ended September 30, 2004, after the market closes on November 1, 2004. In conjunction with this release, Rudolph will host a conference call, which will be broadcast live over the Internet. Paul F. McLaughlin, Chairman and Chief Executive Officer, and Steven Roth, Chief Financial Officer, will host the call.

November 1, 2004
4:45 p.m. (Eastern Time)

To access the live webcast, please visit the Company's Web site at www.rudolphtech.com.
Please go to the Web site at least fifteen minutes prior to the call to register, download and install any necessary audio software.

About Rudolph Technologies, Inc.
Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology and defect inspection systems used by semiconductor device manufacturers. The Company's products provide a full-fab solution through its families of proprietary systems, which are used throughout the device manufacturing process. Rudolph's product development has successfully anticipated and addressed many emerging trends that are driving the semiconductor industry's growth in order to enhance the competitiveness of its products in the marketplace. The Company's success in creating complementary metrology and inspection applications through aggressive research and development is key to Rudolph's strategy for continued technological and market leadership.

Safe Harbor Statement
This press release contains forward-looking statements. Actual results may differ materially from those projected due to a number of risks, including, but not limited to, the impact of the slowdown in the overall economy, the uncertainty of the current global political environment, the potential for terrorist attacks, the potential for business disruptions due to infectious diseases, changes in customer demands for our existing and new products, the timing, cancellation or delay of customer orders and shipments, the timing of revenue recognition of shipments, new product offerings from our competitors, changes in or an inability to execute Rudolph Technologies' business strategy, unanticipated manufacturing or supply problems and changes in tax rules. Rudolph Technologies cannot guarantee future results, levels of activity, performance, or achievements. The matters discussed in this press release also involve risks and uncertainties summarized under the heading "Factors that May Affect Future Results" in Rudolph Technologies' Form 10-K filed for the year ended December 31, 2003. These factors are updated from time to time through the filing of reports and registration statements with the Securities and Exchange Commission. Rudolph Technologies does not assume any obligation to update the forward-looking information contained in this press release.