Leading Disk Drive Manufacturer Chooses NSX 105 to Monitor Read/Write Head Manufacturing

FLANDERS, NJ (June 14, 2007) -- Rudolph Technologies, Inc. (NASDAQ: RTEC), a worldwide leader in high-performance process control metrology, defect inspection and data analysis software for the microelectronics industry, today announced the receipt of orders for six of its NSX® 105 automated macro defect inspection tools from a leading manufacturer of disk drives. The tools will be used to monitor the performance of the lithography process for magnetic head manufacturing. Three of the systems have already shipped and the balance is scheduled for delivery by year end.

The NSX 105 inspection system is designed primarily for back-end semiconductor manufacturing processes after wafer fabrication is complete. This application in front-end lithography is a significant expansion of the tool's application space.

"We are very pleased to receive these orders," commented Mayson Brooks, Rudolph's vice president of global sales. "Although we have a long-standing relationship with this customer, with a large number of systems already installed for outgoing quality control (OQC), this business was secured only after a thorough competitive evaluation in this new application. In the end, competitive tools could not match the NSX for repeatability and tool-to-tool correlation."

Brooks adds, "Both, repeatability and tool-to-tool correlation, contribute to tighter process control. Tool-to-tool matching saves the customer two to three months on each tool startup, since they can simply transfer recipes and characterization data from existing tools -- a new instrument can be qualified for production in less than a week."

Automated macro defect inspection detects defects that occur in a wide range of manufacturing processes. The inspection data enables manufacturers to ensure product quality, and provides them with valuable information about process performance that can be used to improve yields and shorten new process and product development cycles. Rudolph's NSX Series of automated macro defect inspection systems is designed to monitor back-end semiconductor manufacturing processes in a far less restrictive environment than the Class 1 cleanroom conditions required for front-end wafer fabrication. Head manufacturing, which uses front-end processes in a back-end type of environment, is an ideal application for the NSX 105 because it is designed to provide the needed inspection capability without the costly overhead of cleanroom compatibility.

The move from outgoing quality control to photolithography points to an important expansion opportunity for macro defect inspection in head manufacturing. Other front-end processes such as etching and chemical mechanical polishing (CMP) are also candidates for automated inspection. The market for disk drives has also grown rapidly in recent years, driven largely by falling prices and increased demand for consumer devices such as music players, digital video recorders, video surveillance systems and automobiles. The combination of expanding applications space and growing market demand constitutes a significant opportunity for automated inspection tools.

Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com.

Safe Harbor Statement
This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the "Act"). In some cases, you can identify those so-called "forward-looking statements" by words such as "may," "will," "would," "should," "expects," "plans," "anticipates," "believes," "feels," "estimates," "predicts," "potential," or "continue," or the negative of those words and other comparable words. Rudolph wishes to take advantage of the "safe harbor" provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph's control. Factors that could cause actual results to differ materially from the expectations expressed in such forward-looking statements, include, but are not limited to, the impact of the slowdown in the overall economy, the uncertainty of the current global political environment, the potential for terrorist attacks, the potential for business disruptions due to infectious diseases, changes in customer demands for our existing and new products, the timing, cancellation or delay of customer orders and shipments, the timing of revenue recognition of shipments, new product offerings from our competitors, changes in or an inability to execute Rudolph's business strategy, unanticipated manufacturing or supply problems and changes in tax rules. Rudolph cannot guarantee future results, levels of activity, performance, or achievements. The matters discussed in this press release also involve risks and uncertainties as summarized in Rudolph's Form 10-K report for the year ended December 31, 2006 and other filings with the Securities and Exchange Commission ("SEC"), which are available at http://www.sec.gov, the SEC's website, and at http://www.rudolphtech.com, the Rudolph website. While these factors may be updated from time to time through the filing of reports and registration statements with the SEC, Rudolph does not assume any obligation to update the forward-looking information contained in this press release.

For more information, please contact:

Investors:
Steven R. Roth
973.448.4302
steven.roth@rudolphtech.com

Trade Press:
Virginia Becker
952.259.1647
virginia.becker@rudolphtech.com