Home   |   News and Events   |   Rudolph Technologies Announces New Discover Data Analysis Software
Rudolph Technologies Announces New Discover Data Analysis Software

New software enhances return on inspection and metrology investments and speeds time-to-yield learning


SAN FRANCISCO, CA (July 16, 2007) -- Rudolph Technologies, Inc. (NASDAQ: RTEC), a provider of yield management software, defect inspection systems and high-performance process control metrology tools for the semiconductor manufacturing industry, today introduced the Discover™ Data Analysis System, a next-generation software tool designed to provide comprehensive capture and analysis of process performance information, allowing manufacturers to discover and act upon yield improvement opportunities while, at the same time, reduce inspection and yield analysis costs.


Discover is the latest product to be developed by Rudolph's Data Analysis and Review Business Unit, formed to focus exclusively on software tools for yield enhancement. Discover is the next-generation yield management system designed to meet the needs of both process engineers requiring comprehensive methods of data analysis and operators that need to quickly and accurately see the quality data pertaining to their cell. This product, along with other new Rudolph systems, will be featured this week at the semiconductor manufacturing industry's annual trade show, SEMICON® West.


"Using Discover in combination with Rudolph inspection and metrology tools, engineers can increase the efficiency of the review process by twenty-five percent for normal lots and up to ninety percent for lot excursions," said Mike Plisinski, vice president and general manager of Rudolph's Data Analysis and Review Business Unit. "This is accomplished through patented review algorithms that intelligently focus the review process on the defects of interest. Discover makes it easy to drill down through the massive amount of data created by an advanced fab to identify and then store the root cause of an event. With Discover, our customers are experiencing faster inspections, fewer measurements and more accurate classification -- all of which contribute to improved yield and reduced cost-of-ownership."


Discover accepts data from virtually any source: any wafer―bare or patterned; any surface -- front, back, or edge; any type―inspection (micro or macro), metrology, image (optical or SEM); any process -- FEOL to final manufacturing; and any tool―Rudolph or other. Intelligent sampling optimization maximizes inspection tool efficiency and throughput. Fast, accurate defect classification and revolutionary spatial pattern recognition reduce time spent reviewing known defects, allowing engineers to focus on less understood defects. Statistical process control with automated reporting and alerts is designed to get critical information to the right people, fast. Defect signatures fed back to front-end processes can scrap bad wafers early to reduce unproductive process investment.

 

Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com.

 

Safe Harbor Statement
This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the "Act"). In some cases, you can identify those so-called "forward-looking statements" by words such as "may," "will," "would," "should," "expects," "plans," "anticipates," "believes," "feels," "estimates," "predicts," "potential," or "continue," or the negative of those words and other comparable words. Rudolph wishes to take advantage of the "safe harbor" provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph's control. Factors that could cause actual results to differ materially from the expectations expressed in such forward-looking statements, include, but are not limited to, the impact of the slowdown in the overall economy, the uncertainty of the current global political environment, the potential for terrorist attacks, the potential for business disruptions due to infectious diseases, changes in customer demands for our existing and new products, the timing, cancellation or delay of customer orders and shipments, the timing of revenue recognition of shipments, new product offerings from our competitors, changes in or an inability to execute Rudolph's business strategy, unanticipated manufacturing or supply problems and changes in tax rules. Rudolph cannot guarantee future results, levels of activity, performance, or achievements. The matters discussed in this press release also involve risks and uncertainties as summarized in Rudolph's Form 10-K report for the year ended December 31, 2006 and other filings with the Securities and Exchange Commission ("SEC"), which are available at http://www.sec.gov, the SEC's website, and at http://www.rudolphtech.com, the Rudolph website. While these factors may be updated from time to time through the filing of reports and registration statements with the SEC, Rudolph does not assume any obligation to update the forward-looking information contained in this press release.

 

For more information, please contact:

 

Investors:
Steven R. Roth
973.448.4302
steven.roth@rudolphtech.com

 

Trade Press:

Virginia Becker

952.259.1647

virginia.becker@rudolphtech.com