Sales momentum continues as Rudolph's newly acquired products and technologies help customers improve their operating efficiency

Issaquah, Washington (Sept. 3, 2008) ─ Rudolph Technologies, Inc. (NASDAQ: RTEC), a worldwide leader in process characterization solutions for the semiconductor manufacturing industry, today announced the receipt of orders from a major European semiconductor manufacturer for two WaferWoRx® 300 Probing Process Analysis Systems. The orders were placed as part of a multi-tool agreement signed in June 2008.

The WaferWoRx 300 System allows semiconductor manufacturers to make informed decisions based on quantifiable data about their wafer probing process in order to increase yields and reduce operating costs. Rudolph's Probe Card Test and Analysis product manager, Darren James, stated, "We are continually seeking opportunities to reduce the cost and complexity of wafer probing and other final test processes. With today's multi-site, multiple test probe processes, determining the root cause of yield loss is a challenge for our customers. The WaferWoRx generates analyses that helps pin-point the most likely source of probing process problems."

The WaferWoRx 300 is a probing process analysis system that uncovers potential process problems and defines practical solutions based on data from individual probe tips and scrub marks, and on the detection and analysis of larger-scale patterns within the aggregated data. Using automated analysis from WaferWoRx, test engineers can evaluate the stage accuracy, performance under load and test at temperature characteristics of the prober. They can prequalify test cells without risk to production wafers and evaluate the readiness of the probing process for advanced technologies such as multi-DUT and high pin count probe cards. In addition, probe card performance can be tracked to predict the need for maintenance. This step is designed to extend card life and maximize card availability while avoiding the yield losses that can occur when a card fails during use.

"This is a significant sale for an important product recently added to Rudolph's back-end portfolio," James said. "We are investing heavily in these products and technologies; we believe they will enable our customers to improve their operating performance and allow us to maintain our position as the leading supplier of backend inspection, metrology and process control solutions."

Data generated by the WaferWoRx 300 can produce quantifiable benefits by reducing yield losses in the probing process and increase the lifetime and availability of expensive consumables, such as probe cards.

Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com.

Safe Harbor Statement
This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the "Act"). In some cases, you can identify those so-called "forward-looking statements" by words such as "may," "will," "would," "should," "expects," "plans," "anticipates," "believes," "feels," "estimates," "predicts," "potential," or "continue," or the negative of those words and other comparable words. Rudolph wishes to take advantage of the "safe harbor" provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph's control. Factors that could cause actual results to differ materially from the expectations expressed in such forward-looking statements, include, but are not limited to, the impact of the slowdown in the overall economy, the uncertainty of the current global political environment, the potential for terrorist attacks, the potential for business disruptions due to infectious diseases, changes in customer demands for our existing and new products, the timing, cancellation or delay of customer orders and shipments, the timing of revenue recognition of shipments, new product offerings from our competitors, changes in or an inability to execute Rudolph's business strategy, unanticipated manufacturing or supply problems and changes in tax rules. Rudolph cannot guarantee future results, levels of activity, performance, or achievements. The matters discussed in this press release also involve risks and uncertainties as summarized in Rudolph's Form 10-K report for the year ended December 31, 2007 and other filings with the Securities and Exchange Commission ("SEC"), which are available at http://www.sec.gov, the SEC's website, and at http://www.rudolphtech.com, the Rudolph website. While these factors may be updated from time to time through the filing of reports and registration statements with the SEC, Rudolph does not assume any obligation to update the forward-looking information contained in this press release.

For more information, please contact:

Investors
Steven R. Roth
973.448.4302
steven.roth@rudolphtech.com

Trade Press
Virginia Becker
952.259.1647
virginia.becker@rudolphtech.com