Test & Measurement World, June 2008

Jon Titus

"Test engineers who inspect MEMS dice need a system that can focus at different levels," said Rajiv Roy, marketing director for inspection at Rudolph Technologies. "An engineer might say, 'I found a defect deep down in the middle of a channel, but then I found another defect high up on a structure, and I want to see both.' If your system cannot focus at different levels in an adaptive way, you may get a good view of the higher defect but the defect low in the channel looks out of focus. A MEMS inspection system should have the capability to capture high-quality images no matter where a defect lies on the MEMS topography."

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