Classifying defects off-line enables automated inspection systems to maintain their high throughput. Using defect image files captured by automated inspection systems, operators are able to view high-resolution defect images to determine killer defects. Classifying defects enables faster analysis by grouping defects found together as one larger defect, a scratch for example, and defects of similar types across a wafer lot to be grouped based on size, repeating defects and other user defined specifications.

Automatically classifying defects provides far greater yield learning than human classification. Before the introduction of TrueADC™ Software customers were forced to choose between high performance ADC (with a very high cost of ownership) or low performance and low cost of ownership. Rudolph now offers uncompromising performance on all of its ADC products.